Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1980-09-10
1981-12-29
Ozaki, G.
Metal working
Method of mechanical manufacture
Assembling or joining
29 2514, 29 2518, 29569R, 156647, 313309, 313336, 313351, B01J 1700, H01J 102
Patent
active
043075070
ABSTRACT:
A method of manufacturing a field-emitter array cathode structure in which substrate of single crystal material is selectively masked such that the unmasked areas define islands on the underlying substrate. The single crystal material under the unmasked areas is orientation-dependent etched to form an array of holes whose sides intersect at a crystallographically sharp point. Following removal of the mask, the substrate is covered with a thick layer of material capable of emitting electrons which extends above the substrate surface and fills the holes. Thereafter, the material of the substrate underneath the layer of electron-emitting material is etched to expose a plurality of sharp field-emitter tips.
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Gray Henry F.
Greene Richard F.
Beers Robert F.
Ellis William T.
Klein Alan P.
Ozaki G.
The United States of America as represented by the Secretary of
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