Catadioptric reduction projection optical system and method

Details Catadioptric reduction projection optical system and method Catadioptric reduction projection optical system and method

1996-08-14

2000-09-12

Phan, James

Optical: systems and elements

Lens

With reflecting element

359495, 359732, G02B 1700

Patent

active

061185965

ABSTRACT:
A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.

REFERENCES:
patent: 3917399 (1975-11-01), Buzawa et al.
patent: 4793696 (1988-12-01), Suh
patent: 4896952 (1990-01-01), Rosenbluth
patent: 4953960 (1990-09-01), Williamson
patent: 5089913 (1992-02-01), Singh et al.
patent: 5212593 (1993-05-01), Williamson et al.
patent: 5220454 (1993-06-01), Ichihara et al.
patent: 5402267 (1995-03-01), Furter et al.
patent: 5537260 (1996-07-01), Williamson

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