Linear-and-angular measuring plane mirror interferometer

Details Linear-and-angular measuring plane mirror interferometer Linear-and-angular measuring plane mirror interferometer

1989-02-23

1991-11-12

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356358, 356363, G01B 902

Patent

active

050642898

ABSTRACT:
A linear-and-angular measuring plane mirror interferometer measures two degrees of freedom, both linear translation and rotation angle, using a single interferometer optical assembly. In alternate orientations it can be used to measure either the pitch, roll or yaw angle. The linear-and-angular measuring interferometer splits the measurement beam at the interferometer optic, using a single integrated optical assembly to make measurements at two locations on a measuring mirror on a stage. In a first embodiment, the input beam is split, and two separate measurements, X and X', are made at two locations separated by a distance d. A second embodiment optically produces a direct measurement of X--X' at a detector. The input beam makes one interferometer measurement for X, then the polarization of part of the resulting output beam is rotated and the rotated part of the beam is returned for a second pass to make an interferometer measurement at a location offset by a distance d from the first pass measurement.

REFERENCES:
patent: 4859066 (1989-08-01), Sommargren

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