Method and apparatus for heating-up a substrate by means of a lo

Details Method and apparatus for heating-up a substrate by means of a lo Method and apparatus for heating-up a substrate by means of a lo

1992-12-18

1993-10-05

Nguyen, Nam

Electric heating

Metal heating

By arc

20419238, 20429841, 21912136, 21912158, 21912159, B23K 900

Patent

active

052507793

ABSTRACT:
In order to heat-up a commodity to be heated or a substrate to be coated, uniformly in a vacuum chamber or in a recipient, by means of a gas discharge or low voltage arc discharge, at least one locally variable and/or displaceable magnetic field is maintained in the vacuum chamber or in the recipient at least during the heating up step. Preferably, at least two magnet fields are maintained which partially overlap and which alternatingly are operated stronger or weaker, to therewith locally influence the current density in the vacuum chamber or recipient, in order to produce along the substrate or the commodity to be heated, alternatingly a stronger or less strong heating.

REFERENCES:
patent: 3839182 (1974-10-01), Sager
patent: 4197175 (1980-04-01), Moll et al.
patent: 4254159 (1981-03-01), Fulker et al.
patent: 4448802 (1984-05-01), Buhl et al.
patent: 4555611 (1985-11-01), Moll
patent: 4877505 (1989-10-01), Bergmann
patent: 4919968 (1990-04-01), Buhl et al.

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