Synthetic diamond film with reduced bowing and method of making

Details Synthetic diamond film with reduced bowing and method of making Synthetic diamond film with reduced bowing and method of making

1995-05-31

1997-10-21

Turner, Archene

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428216, 428408, I01B 3106

Patent

active

056794460

ABSTRACT:
A synthetic diamond film structure, comprising a generally planar free standing layered diamond structure having a surface area of at least 1000 square millimeters, having the following layers: a first layer having a first thicknesss and a relatively low intrinsic stress; and second layer having a second thickness and a relatively high intrinsic stress; the first thickness being sufficiently thick to prevent the diamond structure from bowing by more than a given distance.

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