Micromechanical structure with textured surface and method for m

Details Micromechanical structure with textured surface and method for m Micromechanical structure with textured surface and method for m

1995-05-22

1997-10-21

Watkins, William

Stock material or miscellaneous articles

Structurally defined web or sheet

Continuous and nonuniform or irregular surface on layer or...

428156, 428137, 7351432, 7351417, 7351436, 361280, G01P 1508, G01P 15125

Patent

active

056794363

ABSTRACT:
A method for forming sub-micron sized bumps on the bottom surface of a suspended microstructure or the top surface of the underlying layer in order to reduce contact area and sticking between the two layers without the need for sub-micron standard photolithography capabilities and the thus-formed microstructure. The process involves the deposition of latex spheres on the sacrificial layer which will later temporarily support the microstructure, shrinking the spheres, depositing aluminum over the spheres, dissolving the spheres to leave openings in the metal layer, etching the sacrificial layer through the openings, removing the remaining metal and depositing the microstructure material over the now textured top surface of the sacrificial layer.

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