Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From phenol – phenol ether – or inorganic phenolate
Patent
1993-02-22
1993-10-05
Schilling, Richard L.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From phenol, phenol ether, or inorganic phenolate
528155, 528165, 430165, 430191, 430192, 430193, 430326, 430905, C08G 804, G03F 7023, G03F 732
Patent
active
052506533
ABSTRACT:
A phenolic novolak resin composition comprising a condensation product of at least one aldehyde source with a phenolic source comprising 5-indanol. Said phenolic novolak resins are used in radiation-sensitive compositions, especially those useful as positive-working photoresists.
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patent: 4943511 (1990-07-01), Lazarus et al.
Chu John S.
OCG Microelectronic Materials Inc.
Schilling Richard L.
Simons William A.
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