Evaporation apparatus

Details Evaporation apparatus Evaporation apparatus

1992-03-04

1993-01-19

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Running length work

118715, 118723, 118724, C23C 1424

Patent

active

051804336

ABSTRACT:
An evaporation apparatus includes a vacuum chamber, a vacuum pump for producing a pressure-reduced atmosphere in the vacuum chamber, at least one vacuum evaporation source for evaporating an evaporation material provided in the vacuum chamber, a can, opposed to the vacuum evaporation source and rotating and ungrounded, for cooling a film on which the evaporation material is to be deposited, a supply roller for supplying the film to the can, a winding roller for winding the film on which the evaporation material has been deposited, a voltage-applying roller for assisting the winding and travel of the film and bringing into contact with a deposited material on the film, and a voltage applying device for applying a DC voltage to the film, on which the evaporation material has been deposited, through the voltage-applying roller to generate potential difference between the film and the can.

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