Polishing apparatus including detachable cloth cartridge

Details Polishing apparatus including detachable cloth cartridge Polishing apparatus including detachable cloth cartridge

1995-11-21

1997-10-21

Eley, Timothy V.

Abrading

Machine

Rotary tool

451286, 451290, 451488, 451550, B24B 704, B24B 2902

Patent

active

056790643

ABSTRACT:
A polishing apparatus includes a light weight and easily interchangeable cloth cartridge of high deformation resistance. The cloth cartridge is made by bonding a polishing cloth to a cartridge base member which includes a honeycomb structure member which can be sandwiched between top and bottom aluminum thin plates. Honeycomb structure member of various cell sizes and materials available in the marketplace can be used for this purpose quite effectively. The honeycomb structure members made of an aluminum material provides a stiff and thermally resistant cartridge base member. Cell spaces in the honeycomb structure member can be cooled or heated, depending on a nature of the polishing slurry used, by passing an appropriate fluid through the base member. This is made possible by providing flow holes in the cell walls separating the honeycomb cells. This approach is effective in producing optimum polishing performance by the cloth cartridge. Thermal control can be exercised generally or locally, depending on where heat is needed or should be removed.

REFERENCES:
patent: 3753322 (1973-08-01), Bordes
patent: 3777443 (1973-12-01), Shaw
patent: 3932966 (1976-01-01), Stern
patent: 4350497 (1982-09-01), Ogman
patent: 4527358 (1985-07-01), Day
patent: 4538384 (1985-09-01), Huber et al.
patent: 4612737 (1986-09-01), Adee et al.
patent: 5400547 (1995-03-01), Tanaka et al.
patent: 5427566 (1995-06-01), Landi et al.

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