Optical height meter, surface-inspection device provided with su

Details Optical height meter, surface-inspection device provided with su Optical height meter, surface-inspection device provided with su

1997-12-04

2000-12-26

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

3562374, 3562391, 250548, G01B 1114, G01N 2100

Patent

active

061668087

ABSTRACT:
A height meter for measuring the height of a first surface of a transparent object is described, which height meter comprises a radiation source for supplying a converging measuring beam whose chief ray extends at an angle to the normal on the surface, and a radiation-sensitive detection unit for detecting a radiation beam reflected by the surface to be measured. Since a diaphragm is arranged in the path of this beam, it is prevented that radiation reflected by a second surface situated opposite the first surface can reach the detection unit. The height meter is notably suitable for an inspection device for a lithographic mask.

REFERENCES:
patent: 3857637 (1974-12-01), Obenreder
patent: 4477185 (1984-10-01), Berger et al.
patent: 4558949 (1985-12-01), Uehara et al.
patent: 5298974 (1994-03-01), Chandley
patent: 5381225 (1995-01-01), Kohno
patent: 5510892 (1996-04-01), Mizutani et al.
patent: 5737074 (1998-04-01), Haga et al.

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