Method for determining the effects of oxygen plasma on a specime

Details Method for determining the effects of oxygen plasma on a specime Method for determining the effects of oxygen plasma on a specime

1989-07-28

1991-09-03

Cuchlinski, Jr., William A.

Measuring and testing

Instrument mechanism or transmission

Rate of change

118712, 118724, G01N 3300, B05C 1100

Patent

active

050442112

ABSTRACT:
A method for determining the effects of exposure of oxygen plasma on a specimen such as a thin film polymer or thin metals. The method includes providing an apparatus with a chamber having a holder supporting the polymer specimen in a plasma environment provided in the chamber. The chamber is regulated to a predetermined pressure and set temperature prior to the introduction of oxygen plasma therein. The specimen is then subjected to the plasma environment for a predetermined time during which time the temperature of the specimen is sensed and regulated to be maintained at the set temperature. Temperature sensing is accomplished by a probe which senses any changes in bulk sample temperature. Temperature regulation is provided by a thermoelectric module and by a coolant flow tube.

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