4. Optical: systems and elements
  5. Deflection using a moving element
  6. Using a periodically moving element

Yutaka Takakubo

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Manufacturing method of scanning optical system

Incremental printing of symbolic information – Light or beam marking apparatus or processes – Scan of light
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Projection aligner and optical system therefor

Optical: systems and elements – Lens – With reflecting element
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Scanning optical system

Optical: systems and elements – Single channel simultaneously to or from plural channels
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Scanning optical system

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
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Scanning optical system

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
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Profile ID: LFUS-PAI-P-2740802

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