4. Material or article handling
  5. Apparatus for moving material between zones having different...
  6. For carrying standarized mechanical interface type

Yukinori Aburatani

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Substrate processing apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Substrate processing apparatus with a processing chamber, transf

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Substrate transferring mechanism

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Treatment object conveyor apparatus, semiconductor...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1286459

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