Yousun Kim

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Details Yousun Kim Yousun Kim

: Etching a substrate: processes
: Gas phase etching of substrate
: Application of energy to the gaseous etchant or to the...

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Method of reducing aluminum fluoride deposits in plasma etch...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Profile ID: LFUS-PAI-P-2765927

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