4. Electricity: motive power systems
  5. Positional servo systems
  6. Digital or numerical systems

Yoshizumi Ito

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Apparatus for detecting the degree of rotation of a rotational a

Electricity: motive power systems – Positional servo systems – Digital or numerical systems
Patent

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Resist coating and recycling method

Coating processes – With post-treatment of coating or coating material – Coating material recirculation or regeneration
Reexamination Certificate

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Resist recycling apparatus and method for recycling the same

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1366817

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