4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Yoji Taguchi

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Method of forming interconnect film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Microwave-excited plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
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