4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Mechanical control system

Yingru Gu

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Endpoint detection in chemical-mechanical polishing of...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Technique for noise reduction in a torque-based...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2712789

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