4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus

Yasunao Oyama

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Crystallization method and crystallization apparatus

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
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Optical member for vacuum ultraviolet, and aligner and...

Optical: systems and elements – Having significant infrared or ultraviolet property – Having ultraviolet absorbing or shielding property
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