4. Coating processes
  5. With post-treatment of coating or coating material
  6. Coating material recirculation or regeneration

Yasuharu Oota

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Resist coating and recycling method

Coating processes – With post-treatment of coating or coating material – Coating material recirculation or regeneration
Reexamination Certificate

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Resist recycling apparatus and method for recycling the same

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Reexamination Certificate

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System for separating and recovering waste fluid and spin...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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