4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Yao-Tzung Roger Shih

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Method and apparatus for workpiece biassing utilizing...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Ultra-thin, corrosion resistant, hydrogenated carbon...

Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Physical dimension specified
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