4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Xiuling Li

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Metal-assisted chemical etch porous silicon formation method

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Metal-assisted chemical etch to produce porous group III-V...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2710561

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