4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Xinye Liu

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Adsorption based material removal process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Adsorption based material removal process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Chemical vapor deposition of aluminum oxide

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Methods for removing silicon nitride and other materials...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-318401

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