4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Xieqing Zhu

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Electron beam imaging apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron beam lithography apparatus focused through...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Electron beam lithography focusing through spherical...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2485263

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