4. Optics: measuring and testing
  5. By light interference
  6. For dimensional measurement

Xiaoqing Yin

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Drive circuit for MEMS device and method of operation thereof

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Methods of testing and manufacturing micro-electrical...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2726508

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