4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Xiancan Deng

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Control of patterned etching in semiconductor features

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Copper etch using HCI and HBr chemistry

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Copper etch using HCl and HBR chemistry

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of heating a semiconductor substrate

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1984305

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