4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Won Yong Koh

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Method for forming a three-component nitride film containing...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Method of forming copper interconnections and thin films...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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