4. Coating processes
  5. Centrifugal force utilized

William T. Rericha

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Method and apparatus for irradiating a microlithographic...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Method and apparatus for irradiating a microlithographic...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Method and apparatus for irradiating a microlithographic...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Method for integrated circuit fabrication using pitch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for integrated circuit fabrication using pitch...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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