4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Whi-kun Yi

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Construction of a chamber casing in a plasma etching system

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Electron amplifier utilizing carbon nanotubes and method of...

Electric lamp and discharge devices – Photosensitive – Secondary emitter type
Reexamination Certificate

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Electron amplifier utilizing carbon nanotubes and method of...

Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Reexamination Certificate

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Field emitter device comprising carbon nanotube having...

Electric lamp and discharge devices – Discharge devices having a multipointed or serrated edge...
Reexamination Certificate

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Method for manufacturing carbon nanotubes

Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
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Profile ID: LFUS-PAI-P-1718614

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