4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Warren K Waskiewicz

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Electron beam imaging apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Illumination system for electron beam lithography tool

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2141392

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