4. Optics: measuring and testing
  5. By light interference
  6. For dimensional measurement

W. Clay Schluchter

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Ambient environment index of refraction insensitive optical...

Optical: systems and elements – Lens – Fluid
Reexamination Certificate

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Heterodyne laser interferometer for measuring wafer stage...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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High efficiency beam distribution with independent wavefront...

Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
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