4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Vladimir Matijasevic

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Apparatus and method for deposition of thin films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Apparatus and method for deposition of thin films

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2610355

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