4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Vladimir I. Vaganov

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Methods for wafer to wafer bonding using microstructures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Optical switch

Optical waveguides – With optical coupler – With alignment device
Reexamination Certificate

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VOA device and attenuation method with improved linearity

Optical waveguides – Accessories – Attenuator
Reexamination Certificate

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VOA with a movable focusing mirror

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2526031

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