4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Valerie G. Dugan

Attorney

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Degassing method and apparatus

Drying and gas or vapor contact with solids – Process – Diverse types of drying operations
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Method and apparatus for forming improved metal interconnects

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method and apparatus for reducing the first wafer effect

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Method for improved chamber bake-out and cool-down

Cleaning and liquid contact with solids – Processes – Including work heating or contact with combustion products
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Reflow chamber and process

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
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Profile ID: LFUS-PAI-P-2072964

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