4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Vadim Y. Banine

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Integrating waveguide for use in lithographic projection...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Lithographic apparatus, device manufacturing method, and...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Lithographic projection apparatus equipped with extreme...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic projection apparatus, device manufacturing...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Radiation source for use in lithographic projection apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2483407

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