4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Vadim G. Dudnikov

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Ion implantation with charge neutralization

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion source

Radiant energy – Ion generation – Field ionization type
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Space charge neutralization of an ion beam

Radiant energy – Electrically neutral molecular or atomic beam devices and...
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Profile ID: LFUS-PAI-P-2080705

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