4. Optics: measuring and testing
  5. Shape or surface configuration
  6. By focus detection

Tsukuba Seiko Ltd.

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Electrostatic holding device and electrostatic tweezers...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method and apparatus for measuring heights of test parts of...

Optics: measuring and testing – Shape or surface configuration – By focus detection
Reexamination Certificate

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