4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Truc T. Tran

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Reactor optimized for chemical vapor deposition of titanium

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Showerhead assembly for a processing chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1666565

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