4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Troy Allan Chase

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MEMS sensor structure and microfabrication process therefor

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method and apparatus for electrically testing and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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