4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Troy A. Chase

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Deep reactive ion etching process and microelectromechanical...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Encapsulation wafer process

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Having enclosed cavity
Reexamination Certificate

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