4. Photocopying
  5. Projection printing and copying cameras
  6. Focus or magnification control

Toshitaka Amano

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Exposure apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Exposure apparatus and pressure correction method

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2685237

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