4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Toshihiko Hanamachi

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Apparatus for vapor deposition

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Ceramics heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Ceramics heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Heating apparatus

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-386280

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