4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Tom Madar

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Method and apparatus for preventing edge deposition

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Self aligning non contact shadow ring process kit

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2485151

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