4. Powder metallurgy processes
  5. Powder metallurgy processes with heating or sintering
  6. Sintering which includes a chemical reaction

Tohru Komatsu

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Refractory metal silicide target, method of manufacturing...

Powder metallurgy processes – Powder metallurgy processes with heating or sintering – Sintering which includes a chemical reaction
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Refractory metal silicide target, method of manufacturing...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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