4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Timothy I Cox

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Molecular single electron transistor (MSET) detector device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device
Reexamination Certificate

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Silicon micro-machined projection with duct

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2796647

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