4. Computer-aided design and analysis of circuits and semiconductor
  5. Nanotechnology related integrated circuit design

Timothy C. Dean

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Capturing an evolving wafer fabrication method and system

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Identifying relationships among constituent parts of a wafer...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Identifying wafer fabrication system impacts resulting from...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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