4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Etching inorganic substrate

Tien-Sung Chen

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Interconnect process and method for removing metal silicide

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of metal etching post cleaning

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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