4. Valves and valve actuation
  5. Electrically actuated valve
  6. Rotary electric actuator

Thomason Moser Patterson

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Electrostatic chuck with improved RF power distribution

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Electrostatic chuck with improved temperature control and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for supplying a chucking voltage to an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Plasma etching of silicon using fluorinated gas mixtures

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Stand-off pad for supporting a wafer on a substrate support...

Coating apparatus – Work holders – or handling devices
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Profile ID: LFUS-PAI-P-2010068

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