4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Thomason, Moser & Patterso

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Apparatus and method for controlling plasma uniformity in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Chemical vapor deposition vaporizer

Coating apparatus – Gas or vapor deposition – With treating means
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Step coverage and overhang improvement by pedestal bias...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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