4. Electricity: motive power systems
  5. Linear-movement motors

Thomas Petrus Hendricus Warmerdam

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Actuator arrangement for active vibration isolation using a...

Brakes – Inertia of damping mass dissipates motion
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Apparatus for processing an object with high position accurancy

Electricity: motive power systems – Linear-movement motors
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Apparatus for processing an object with high position accurancy

Electricity: motive power systems – Linear-movement motors
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Lithographic projection apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-2382623

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