4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Thomas Kring

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Antenna coil assemblies for substrate processing chambers

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Upper chamber for high density plasma CVD

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Upper chamber for high density plasma CVD

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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Profile ID: LFUS-PAI-P-2150411

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